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Porta FOSB<span class='small-trade'>™</span>
Porta FOSB<span class='small-trade'>™</span>
Porta FOSB<span class='small-trade'>™</span>
 

특징:

  • BOLTS Compatible Mechanical Interface
  • Compatible Carriers - 300mm FOSB, 200mm, 150mm Open Cassettes
  • Carrier Presence Sensors for each wafer size
  • Carrier Presence Indicator
  • Access OK Indicator
  • Load Time: 28 sec.
  • Unload Time: 28 sec.
  • Outstanding performance based on servo controlled mechanisms
  • Minimal particle, vibration and noise generation
  • Modular design, easy maintenance access

Conforming SEMI Standards:

  • E15.1: Load Port
  • S2 Compliance
  • S8 Ergonomics guideline compliance
  • E44 Guide for Procurement and Acceptance of Minienvironments
  • E57 Mech. Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
  • E10 Availablity

Other Standards:

  • Seismic Stability for UBC Zone 4 area and S2
  • EU Machinery Directive
  • EU Low voltage dir.
  • EU EMI/ESD
  • Carrier ID Reader per I300I Factory guideline
  • MCBIp > 150K cycles
  • MCBI > 321,877 cycles
  • MTTR 60 minutes
  • Availability 99.89%
     

Porta FOSB

Genmark Automation의 Porta FOSB™는 300mm 전면 개방 저장 박스(FOSB)에 대해 특별히 설계된 다목적 로드포트입니다. Porta FOSB™는 서보 작동 인클로저를 통해 분리되어 있으며, 이는 웨이퍼와 clean front-end mini-environments에 안전하게 접근할 수 있도록 합니다. 설계의 다기능성을 통해 150mm 혹은 200mm 개방형 Cassette를 수용합니다. 전용 캐리어 감지센서는 로드된 캐리어의 사이즈를 나타냅니다. 내장 컴퓨터와 컨트롤러로 제어되어, 장비와 운영자는 여러 하드웨어 및 소프트웨어 안전 연결장치를 통해 보호됩니다. Porta FOSB™는 모든 해당 SEMI 표준 및 I300I 지침에 따르지만 독특하게 설계되었으며 이 범주의 장비 중에서 청결, 신뢰성, 성능, 기능성에서 새로운 기준을 설정했습니다.

Specification:

Configuration  
Compatibility BOLTS compatible
Carrier Types - FOUP, 25 wafers
- 25 wafwers 150mm and 200mm cassettes when using open cassette adaptor
Wafer Size 150mm, 200mm, 300mm
Substrate Type wafer
Status Indicators 2 lights - "Placement" and "Action OK"
Carrier Sensors - FOUP placement
- 150mm carrier placement
- 200mm carrier placement
Physical Properties  
Height 1336mm (52.30 inches
Width 470mm (18.50 inches)
Actuatio - Pneumatic (the tilting motion of the loading plate)
- Servo motor driven top and side covers
Performance  
Reliability MCBlp > 150K cycles
MCBl > 321.877 cycles
MTTR 60 minutes
Availability 99.89%
Speed Load 30 seconds
Unload 30 seconds
Environment  
Cleanliness Class 1 ANSI, when in class 100 environment
Standards Compliance  
SEMI - E15.1: Load Port
- S2 Compliance
- S8 Ergonomics guideline compliance
- E44 Guide for Procurement and Acceptance of Minienvironments
- E57 Mech. Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
- E10 Availablity
Other Standards - Seismic Stability for UBC Zone 4 area and S2
- EU Machinery Directive
- EU Low voltage dir.
- EU EMI/ESD
- Carrier ID Reader per I300I Factory guideline
Reliability per SEMI E10  
MCBF (cycles) > 1M